6674 Series - 316L SS Diaphragm Valves

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6674 Series - 316L SS Diaphragm Valves
Sherwood’s 6674 Series is used in corrosive gas applications, cylinder phosphine gas, atmospheric and purging gases, dopant gases and reactant gases.

• Crimped seat feature with anti-extrusion pin prevents seat extrusion and cold flow of the polymeric seat
• Available in multiple seat material configurations to accommodate all high-purity gas applications
• Increased flow (Cv) to aid in reducing vent and purge times
• Low operating torque design ensures ease of operation during filling and use
• Available with unitized pressure-relief device having fuse-metal backed or unbacked burst disc
• Available with standard CGA connections as well as international inlets and outlets